Is this a covered area? Wood is never waterproof, but water resistant. Composite material would be best for area that have higher moisture.

Yes, patio covered area. Just trying to understand what I if I should use plywood under and then like some type of foam on top of it. I definitely do not want to get any mold on the mats since it is outside.

I would make a Spring deck with the mats on top of it, this would allow for airflow underneath the plywood decking. you will also want to use plywood rated for outdoor use, not because it will get rain, but the glue that is used for the outdoor-rated wood is better lasting and won't break down in moisture. Also it is always best to have a barrier between any wood and concrete because even pressure-treated wood will eventually soak up moisture from the concrete and rot. There are many products out there that you can use for that barrier.